Optimization of Soft X-Ray Fresnel Zone Plate Fabrication Through Joint Electron Beam Lithography and Cryo-Etching Techniques
- Labani, M.
- Clericò, V.
- Diez, E.
- Gatti, G.
- Amado, M.
- Pérez-Rodríguez, A.
Journal:
Nanomaterials
ISSN: 2079-4991
Year of publication: 2024
Volume: 14
Issue: 23
Type: Article