Optimization of Soft X-Ray Fresnel Zone Plate Fabrication Through Joint Electron Beam Lithography and Cryo-Etching Techniques

  1. Labani, M.
  2. Clericò, V.
  3. Diez, E.
  4. Gatti, G.
  5. Amado, M.
  6. Pérez-Rodríguez, A.
Journal:
Nanomaterials

ISSN: 2079-4991

Year of publication: 2024

Volume: 14

Issue: 23

Type: Article

DOI: 10.3390/NANO14231898 GOOGLE SCHOLAR lock_openOpen access editor
Data source: Scopus