Comparison of the multi-gate functionality of screen-grid field effect transistors with finFETs

  1. Shadrokh, Y.
  2. Fobelets, K.
  3. Velazquez-Perez, J.E.
Zeitschrift:
Semiconductor Science and Technology

ISSN: 0268-1242 1361-6641

Datum der Publikation: 2008

Ausgabe: 23

Nummer: 9

Art: Artikel

DOI: 10.1088/0268-1242/23/9/095006 GOOGLE SCHOLAR