Optical ridge waveguides in 4H-SiC single crystal produced by combination of carbon ion irradiation and femtosecond laser ablation

1. Luan, Q.
2. Jia, Y.
3. Wang, Y.
4. Akhmadaliev, S.
5. Zhou, S.
6. Vázquez de Aldana, J.R.
7. Tan, Y.
8. Chen, F.