Spectroscopic ellipsometry of intentionally disordered superlattices

  1. Domínguez-Adame, F.
  2. Hey, R.
  3. Bellani, V.
  4. Parravicini, G.B.
  5. Diez, E.
Journal:
Microelectronics Journal

ISSN: 0026-2692

Year of publication: 2004

Volume: 35

Issue: 1

Pages: 59-61

Type: Conference paper

DOI: 10.1016/S0026-2692(03)00223-4 GOOGLE SCHOLAR
Data source: Scopus