Design and characterization of a pulsed plasma source

  1. Del Val, J.A.
  2. Mar, S.
  3. Gigosos, M.A.
  4. De La Rosa, I.
  5. Pérez, C.
  6. González, V.
Journal:
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

ISSN: 0021-4922

Year of publication: 1998

Volume: 37

Issue: 7

Pages: 4177-4181

Type: Article