Characterization of thick conducting molybdenum films: Enhanced conductivity via thermal annealing

  1. Marcelli, A.
  2. Spataro, B.
  3. Sarti, S.
  4. Dolgashev, V.A.
  5. Tantawi, S.
  6. Yeremian, D.A.
  7. Higashi, Y.
  8. Parodi, R.
  9. Notargiacomo, A.
  10. Xu, J.
  11. Cappuccio, G.
  12. Gatti, G.
  13. Cibin, G.
Journal:
Surface and Coatings Technology

ISSN: 0257-8972

Year of publication: 2015

Volume: 261

Pages: 391-397

Type: Article

DOI: 10.1016/J.SURFCOAT.2014.10.050 GOOGLE SCHOLAR