Characterization of thick conducting molybdenum films: Enhanced conductivity via thermal annealing

  1. Marcelli, A.
  2. Spataro, B.
  3. Sarti, S.
  4. Dolgashev, V.A.
  5. Tantawi, S.
  6. Yeremian, D.A.
  7. Higashi, Y.
  8. Parodi, R.
  9. Notargiacomo, A.
  10. Xu, J.
  11. Cappuccio, G.
  12. Gatti, G.
  13. Cibin, G.
Revue:
Surface and Coatings Technology

ISSN: 0257-8972

Année de publication: 2015

Volumen: 261

Pages: 391-397

Type: Article

DOI: 10.1016/J.SURFCOAT.2014.10.050 GOOGLE SCHOLAR