Automated and inexpensive method to manufacture solid- state nanopores and micropores in robust silicon wafers

  1. Vega, M.
  2. Granell, P.
  3. Lasorsa, C.
  4. Lerner, B.
  5. Perez, M.
Konferenzberichte:
Journal of Physics: Conference Series

ISSN: 1742-6596,  1742-6588

Datum der Publikation: 2016

Ausgabe: 687

Nummer: 1

Art: Konferenz-Beitrag

DOI: 10.1088/1742-6596/687/1/012029 GOOGLE SCHOLAR lock_openOpen Access editor
Datenquelle: Scopus