Automated and inexpensive method to manufacture solid- state nanopores and micropores in robust silicon wafers

  1. Vega, M.
  2. Granell, P.
  3. Lasorsa, C.
  4. Lerner, B.
  5. Perez, M.
Proceedings:
Journal of Physics: Conference Series

ISSN: 1742-6596,  1742-6588

Year of publication: 2016

Volume: 687

Issue: 1

Type: Conference paper

DOI: 10.1088/1742-6596/687/1/012029 GOOGLE SCHOLAR lock_openOpen access editor
Data source: Scopus