Automated and inexpensive method to manufacture solid- state nanopores and micropores in robust silicon wafers

  1. Vega, M.
  2. Granell, P.
  3. Lasorsa, C.
  4. Lerner, B.
  5. Perez, M.
Actas:
Journal of Physics: Conference Series

ISSN: 1742-6596,  1742-6588

Ano de publicación: 2016

Volume: 687

Número: 1

Tipo: Achega congreso

DOI: 10.1088/1742-6596/687/1/012029 GOOGLE SCHOLAR lock_openAcceso aberto editor
Fonte de datos: Scopus