Automated and inexpensive method to manufacture solid- state nanopores and micropores in robust silicon wafers

  1. Vega, M.
  2. Granell, P.
  3. Lasorsa, C.
  4. Lerner, B.
  5. Perez, M.
Actes de conférence:
Journal of Physics: Conference Series

ISSN: 1742-6596,  1742-6588

Année de publication: 2016

Volumen: 687

Número: 1

Type: Communication dans un congrès

DOI: 10.1088/1742-6596/687/1/012029 GOOGLE SCHOLAR lock_openAccès ouvert editor
La source de données: Scopus